Comparison of nanoindentation results obtained with Berkovich and cube-corner indenters
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چکیده
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15 صفحه اولBerkovich Nanoindentation on AlN Thin Films
Berkovich nanoindentation-induced mechanical deformation mechanisms of AlN thin films have been investigated by using atomic force microscopy (AFM) and cross-sectional transmission electron microscopy (XTEM) techniques. AlN thin films are deposited on the metal-organic chemical-vapor deposition (MOCVD) derived Si-doped (2 × 1017 cm-3) GaN template by using the helicon sputtering system. The XTE...
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ژورنال
عنوان ژورنال: Philosophical Magazine
سال: 2006
ISSN: 1478-6435,1478-6443
DOI: 10.1080/14786430600746424